685-247270-001 LAM
685-247270-001 LAM Product Description
685-247270-001 is a plasma etching chamber manufactured by LAM Research Corporation for the etching process.It has the following characteristics:
High precision:High precision etching can be achieved to meet the needs of advanced semiconductor manufacturing processes.
High efficiency:With high production efficiency,can improve the wafer output.
High reliability:Adopt mature technology and process to ensure stable operation of equipment.
Product parameter
Model:685-247270-001
Applicable wafer size:8 inches
Etching process:RIE,ICP
Chamber type:Single chamber
Power supply:RF,ICP
Vacuum degree:<10^-6 Torr
Product application
685-247270-001 can be used in the manufacture of various semiconductor devices,such as:
Integrated circuit
Power device
Optoelectronic device
MEMS device
Brand introduction
LAM Research Corporation is an American company founded in 1980 that specializes in the development and manufacture of semiconductor manufacturing equipment.LAM’s products and services are available in more than 170 countries around the world and have a strong reputation in the field of semiconductor devices.