853-150806-001 LAM
853-150806-001 LAM Product Description
Product overview
The 853-150806-001 is a component for plasma etching chambers for the etching process manufactured by LAM Research Corporation.It has the following characteristics:
High precision:High precision etching can be achieved to meet the needs of advanced semiconductor manufacturing processes.
High efficiency:With high production efficiency,can improve the wafer output.
High reliability:The use of mature technology and process to ensure the stable operation of components.
Product parameter
Model:853-150806-001
Applicable wafer size:8 inches
Etching process:RIE,ICP
Chamber type:Single chamber
Material:Quartz
Size:100mm x 100mm x 10mm
Product application
853-150806-001 can be used in the manufacture of various semiconductor devices,such as:
Integrated circuit
Power device
Optoelectronic device
MEMS device
Brand introduction
LAM Research Corporation is an American company founded in 1980 that specializes in the development and manufacture of semiconductor manufacturing equipment.LAM’s products and services are available in more than 170 countries around the world and have a strong reputation in the field of semiconductor devices.