001-4130-03 BROOKS AUTOMATION
Product overview
The 001-4130-03 is a vacuum wafer alignment controller manufactured by Brooks Automation for the precise alignment of wafers in semiconductor manufacturing processes.It has the following characteristics:
High precision:High precision wafer alignment can be achieved to meet the stringent semiconductor manufacturing process requirements
High reliability:The use of mature technology and components to ensure reliable operation
Easy to use:Simple to operate,easy to set up and maintain
Scalability:Scalable to meet different production needs
Strong compatibility:compatible with various semiconductor devices
Product parameter
Alignment accuracy:±0.5μm
Repeatability:±0.2μm
Processing capacity:Processing up to 100 wafers per hour
Applicable wafer sizes:4″to 12″
Interface:RS-232,RS-485
Product application
001-4130-03 Vacuum wafer alignment controllers can be used in a variety of semiconductor manufacturing processes,including:
Wafer lithography
Wafer etching
Wafer deposition
Wafer diffusion
Wafer testing
Brand introduction
Brooks Automation is a globally recognized vacuum and automation technology company providing innovative solutions to customers in the semiconductor,life sciences,industrial and analytics sectors.The company was founded in 1959 and is headquartered in Lowell,Massachusetts,USA.Brooks Automation’s products and services cover a wide range of vacuum pumps,flow controllers,pressure controllers,automation systems and other related products.The company is committed to providing customers with high performance,reliable and innovative products,
