IC660ELD100A GE
CENTURA SLIT VALVE DOOR PART # 0021-09922
AMAT PART # 0200-10455
NOVELLUS THERMOCOUPLE UNIT PART # 03-10411-00
LAM ESC POWER SUPPLY DISTR. PCB PART # 810-370141-001
AMAT PART #0020-29343 DARK SPACE SHIELD CLAMP
AMAT PORT SERVER CABLE PART # 0140-77615
AMAT PART # 0200-76019 10N SHIELD LIFT
AMAT PART # 0200-32985 GAS RING 12 HOLES
MKS ISOLATION VALVE MODEL # L2-40-AK-225-VNVNH
AMAT PART 0020-19002
LAM GATE HEAD IONIZED PART # 715-012233-003
VEXTA STEPPING MOTOR MODEL PX243-01B
LAM 6 ” SPIN CHUCK PART # 715-013718-006
AMAT PART # 0200-09086
SLOW VACUUM VALVE MODEL # FPR-91-9.52
PEDESTAL VACUUM PRESSURE SWITCH PART # 0090-77032
LAM RESEARCH BAFFLE PLATE LOWER PART # 715-011913-083
USHIO 100W Merqury Short Lamp
AMAT PART # 0020-21944 8″ QTZ PRECLEAN PLATE
CERAMIC LIFT PIN/SHORT PART # 0200-10162
796-00809 ANGLE VALVE REBUILD KIT
CONN ADPTR MTG QDS-UL(F)/QC(M) AMAT PART # 0020-04376
LIFT PIN, .090, SIMPLE CATH AMAT PART # 0021-10566
AMAT PART # 0200-35224 VIEWPORT WINDOW
AMAT PART # 0200-35160
FRAME ALIGNMENT PIN PART # 0020-27812
VACUUM SWITCH PART # 853-017631-001
TEFLON RING BLOCKER AMAT PART # 0021-38799
LOWER MAGNETIC BRACKET AMAT PART # 0021-36605
AMAT PART # 0200-35013
BRACKET COIL FRONT PART #0021-36606
JUMPER 4PIN CONN, GEN RACK EMO AMAT PART# 0150-20143