1756-L73 AB

7 STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2, used

Thermo Neslab M25 chiller, used, as is

Novellus 02-105005-00 ASSY,MC,P166,W/​8 RS232 controller

EDWARDS DP80 Dry Vacuum Pump, used, as is

ENI OEM-25A-21091-5​1 RF Generator, 2500 W, 13.56 MHz,

RFPP RF Generator ICP-20P Model# 8511139050, 2000 W

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