Description
Tokyo Electron Limited Upper Y(Hand) Electrode
Yaskawa Servopack AC Servo Drive 0500-00285 SGDS-50
Adlink AMAT cPCI-3720 Single Board Computer 0190-28791
HP Hewlett Packard 6260B DC Power Supply 0750-6310-010W
Asyst Load Port 300FL, S2.1HAMA/E-84 9700-6149-01
Anelva Motor Control Unit A A12-05110 working
Anelva Sputter Motor Control Unit-B A12-03638 working
MECS Corp. Wafer Prealigner AL100 untested
MECS Corp. Prealigner AL100 untested
AE Advanced Energy E’Wave 3152603-005 DC Power Supply R
