Description
TEL Tokyo Electron 1B05-200052-13 Quartz Baffle Refurbi
Eurotherm ACMN00504/16BR-G Schenckengetriebe S102VN0440
Yaskawa SGDA-04AS Servopack Servo Drive 200V
AMAT Quantum Leap III Turbopump Interface 0100-01326
AMAT Quantum Leap III TPDU Monitor Card 0100-90492
AMAT XR80 Monitor Interface Board 0100-91015 working
AMAT XR80 Decel PSU Interface 0100-90934 working
AMAT XR80 Focus PSU Interface 0100-01696 working
AMAT XR80 Spin Control Board PCB 0100-91006 working
200mm Electrode Cover 28214531T1140